South Korea Streamlines Industrial Safety Rules for EUV Equipment and CO2 Cleaning Systems
biz.chosun.comSouth Korea is updating its High-Pressure Gas Safety Control Act to speed up the import of EUV lithography equipment for semiconductor giants like Samsung and SK hynix. The changes reduce inspection times from 34 days to 9 days and lower costs by removing redundant interim inspections. Beyond semiconductors, the government is introducing new standards to enable the use of liquid carbon dioxide cleaning systems. This technology replaces traditional water and detergent cleaning in industrial settings, reducing waste and improving sustainability in manufacturing.
